Title

A new type of atomic force microscope based on chaotic motions

Document Type

Article

Date of Original Version

7-1-2008

Abstract

Local flow variation (LFV) method of non-linear time series analysis is applied to develop a chaotic motion-based atomic force microscope (AFM). The method is validated by analyzing time series from a simple numerical model of a tapping mode AFM. For both calibration and measurement procedures the simulated motions of the AFM are nominally chaotic. However, the distance between a tip of the AFM and a sample surface is still measured accurately. The LFV approach is independent of any particular model of the system and is expected to be applicable to other micro-electro-mechanical system sensors where chaotic motions are observed or can be introduced. © 2008 Elsevier Ltd. All rights reserved.

Publication Title

International Journal of Non-Linear Mechanics

Volume

43

Issue

6

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