Title

Accuracy enhancement of a piezoelectric actuator with hysteresis

Document Type

Conference Proceeding

Date of Original Version

12-1-1992

Abstract

Piezoelectric actuators are increasingly being used in precision positioning applications due to their fine motion resolution capability and fast response. However, their open loop control accuracy is seriously limited by their hysteresis. This paper addresses the development of a dynamic model of piezoelectric actuators that incorporates hysteresis. A procedure for identifying the model parameters based on using a nonlinear filtering technique is presented. The ideas were applied to a piezoelectric actuator in stacked form, and the results show that by estimating the nonlinear hysteresis behavior of the actuator and applying it in a feedforward control scheme, linear behavior is obtained under open loop control.

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