Title

Dielectric stability of oxides formed on NiCrAlY-coated substrates

Document Type

Article

Date of Original Version

7-15-1992

Abstract

A high quality dielectric layer is essential to the performance of high temperature thin film sensors fabricated on superalloy engine components. The microstructure, deposition method and heat treatment procedures for a number of dielectric films were investigated in terms of their performance. Dielectric layers consisting of a thermally grown Al2O3 layer and a sputtered Al2O3 or SiO2 layer exhibited the highest dielectric strengths of all composites formed on NiCrAlY-coated superalloy substrates. The dielectric properties of these native and non-native oxides are reported from room temperature to 1000 °C. © 1992.

Publication Title

Thin Solid Films

Volume

214

Issue

2

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