Dielectric stability of oxides formed on NiCrAlY-coated substrates
Document Type
Article
Date of Original Version
7-15-1992
Abstract
A high quality dielectric layer is essential to the performance of high temperature thin film sensors fabricated on superalloy engine components. The microstructure, deposition method and heat treatment procedures for a number of dielectric films were investigated in terms of their performance. Dielectric layers consisting of a thermally grown Al2O3 layer and a sputtered Al2O3 or SiO2 layer exhibited the highest dielectric strengths of all composites formed on NiCrAlY-coated superalloy substrates. The dielectric properties of these native and non-native oxides are reported from room temperature to 1000 °C. © 1992.
Publication Title, e.g., Journal
Thin Solid Films
Volume
214
Issue
2
Citation/Publisher Attribution
Trottier, C. M., Otto J. Gregory, and Kenneth A. Burbank. "Dielectric stability of oxides formed on NiCrAlY-coated substrates." Thin Solid Films 214, 2 (1992): 253-259. doi: 10.1016/0040-6090(92)90779-B.