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We have fabricated a model system of precisely layer-engineered inorganic− organic thin-film structures using atomic/molecular-layer deposition (ALD/MLD). The samples consist of nanoscale polycrystalline ZnO layers and intervening benzene layers, covering a broad range of layer sequences. The samples characterized in this study combined with previous publications provide an excellent sample set to examine thermal transport properties in inorganic−organic thin films. The cross-plane thermal conductivity is found to depend on multiple factors, with the inorganic−organic interface density being the dominating factor. Our work highlights the remarkable capability of interface engineering in suppressing the thermal conductivity of hybrid inorganic−organic materials, e.g., for thermoelectric applications.

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This work is licensed under a Creative Commons Attribution 4.0 License.