A new type atomic force microscope based on chaotic motions

Document Type

Conference Proceeding

Date of Original Version



In this paper, a time domain data processing method, local flow variation (LFV) is applied, to analyze time series from a numerical model of an atomic force microscope (AFM). Although motions of the AFM are chaotic, the change of surface features (distance between a tip of the AFM and a sample surface) can still be identified. Based on the LFV method, we can develop a new type AFM which can handle chaotic motions. Because the LFV approach does not rely on any specific models, it can also be applied to other MEMS sensors where chaotic motions are dominant.

Publication Title, e.g., Journal

Proceedings of the 2006 SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2006



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