APPLICATIONS OF OXIDES AND NITRIDES OF GERMANIUM FOR SEMICONDUCTOR DEVICES.

O. J. Gregory, University of Rhode Island
E. E. Crisman, University of Rhode Island

Abstract

The reactions of germanium with oxygen and with nitrogen are reviewed. Particular emphasis has been placed on the relationship between the structure and electronic properties of the oxide and nitride films formed on single crystal germanium surfaces under different processing conditions. A summary of the electronic properties reported is presented and some conclusions are offered based on the recent literature.