Title

Local pressure measurement of gaseous flow through microchannels

Document Type

Conference Proceeding

Date of Original Version

12-1-1999

Abstract

This paper presents an experimental investigation on nitrogen and helium flow in microchannels etched in silicon with hydraulic diameters of 9.7, 19.6, and 46.6 μm, and Reynolds numbers ranging from 0.2 to 1000. The objectives of this research are (1) to measure the pressure distribution along the length of a microchannel; and (2) to determine the friction factor within the fully developed region of the microchannel. The pressure distribution is presented as absolute local pressure plotted against the distance from the microchannel inlet. The friction factor results are presented as the product of friction factor and Reynolds number plotted against Reynolds number with the outlet Knudsen number, Kn, as a curve parameter. The following conclusions have been reached in the present investigation: (1) Pressure losses at the microchannel entrance can be significant; (2) the product, f*Re, when measured sufficiently far away from the entrance and exit is a constant in the laminar flow region; and (3) the friction factor decreases as the Knudsen number increases.

Publication Title

American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

Volume

364-3

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