Title

Ceramic temperature sensors for gas turbine engine applications

Document Type

Conference Proceeding

Date of Original Version

12-1-2004

Abstract

A thin film ceramic thermocouple based on indium-tin-oxide (ITO) thin films was developed to measure the surface temperature of both static and dynamic engine components. It was observed that fabrication of two different ITO elements made possible the construction of a robust caramic thermocouple. It was also observed that ITO thin films prepared in nitrogen rich plasmas have survived temperatures in excess of 1575°C. The thermal cycling of ITO thin films in various oxygen partial pressures showed that the temperature coefficient of resistance (TCR) was nearly independent of oxygen partial pressure.

Publication Title

Technical Papers of ISA

Volume

451

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