Title

Modeling and control of a micro-positioning tower

Document Type

Article

Date of Original Version

1-1-1997

Abstract

The design of a feedback controller for the z-motion of a positioning tower made up of a vertical motion micro-positioning stage situated on a pair of x-y Klinger stages is discussed. A three-degree of freedom dynamic model was built using frequency response experimental data to represent the dynamics of the micro-positioning tower system in the vertical direction. Based on this model, a controller was designed which combines a PID closed-loop controller and a 4th-order Chebyshev lowpass filter in series. Both simulation and real-time tests were performed for the designed control scheme, and the tracking control performance, disturbance rejection and oscillation suppression have improved using this controller. The settling time of the designed closed-loop control system is one third of that of the open-loop system, and frequency response tests on the real system show that a flat magnitude response with less than 3 dB attenuation is achieved over the frequency range of 0-75 Hz using this controller. © 1997 Elsevier Science Ltd.

Publication Title

Mechatronics

Volume

7

Issue

5

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