Date of Original Version
A predictive film thickness model based on an accepted equation of state is applied to the spin-coating of sub-micron poly(methylmethacrylate) viscous thin films from toluene. Concentration effects on density and dynamic viscosity of the spin-coating solution are closely examined. The film thickness model is calibrated with a system-specific film drying rate and was observed to scale with the square root of spin speed. Process mapping is used to generate a three-dimensional design space for the control of film thickness.
Chapman, N., Chapman, M., & Euler, W. B. (2021). Modeling of Poly(methylmethacrylate) Viscous Thin Films by Spin-Coating. Coatings, 11(2), 198. doi:10.3390/coatings11020198
Available at: https://doi.org/10.3390/coatings11020198
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