Ceramic temperature sensors for gas turbine engine applications

Document Type

Conference Proceeding

Date of Original Version



The high temperature behavior of ceramic temperature sensors prepared under different plasma conditions and its potential in aerospace applications were analyzed. High purity aluminum oxide substrates were used for all high temperature electrical tests. The indium-tin-oxide (ITO) and platinum/rhodium films were deposited by rf reactive sputtering using an MRC 822 sputtering system. Results show that temperature coefficient of resistance (TCR) was very stable and not affected by partial pressure at temperature above 700°C. The burner rig test indicated that ITO ceramic thermal sensor has improved stability and sensitivity, which makes them a good candidate for the gas turbine engine applications.

Publication Title

Proceedings of the International Instrumentation Symposium

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